Etching in microsystem technology [Latin Book]
Kohler, J. M.(J. Michael),1956-
| Record Identifier: | 3220 |
| Class: | .M3,K64 1999 TK 7872 |
| Title: | Etching in microsystem technology |
| Authorstatement: | Kohler, J. M.(J. Michael),1956- |
| Subject: | Masks (Electronics) |
| Subject: | Microlithography |
| Subject: | Plasma etching |
| ISBN: | 3527295615 |
| Title: | Atzverfahren fur die Mikrotechnik.English |
| Publisher: | Weinheim ; New York,1999,Wiley-VCH |
| Publish place: | Weinheim ; New York |
| Publisher: | Wiley-VCH |
| Publish Date: | 1999 |
| Register Number | Version | Volume | Part | Reference | Call Number | lended | Date Back | Description | |
|---|---|---|---|---|---|---|---|---|---|
| 2580 | 1 | 0 |
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