Plasma-aided nanofabrication [Latin Book]

Ostrikov, K. Kostya

Record Identifier: 3960
Class: .N35,O876
2007
TA
418.9
Title: Plasma-aided nanofabrication
Authorstatement: Ostrikov, K. Kostya
Subject: Nanostructured materials
Subject: Plasma engineering
Subject: Low temperature plasmas
Subject: Manufacturing processes
Publisher: weinheim,2007,Wiley-VCH
Sub Title: from plasma sources to nanoassembly
Publish place: weinheim
Publisher: Wiley-VCH
Publish Date: 2007
Register Number Version Volume Part Reference Call Number lended Date Back Description
3372 1 0
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