Micro process engineering [Latin Book]
| Record Identifier: | 3591 |
| Class: | .M52 2006 TS 183 |
| Title: | Micro process engineering |
| Subject: | Production engineering |
| Subject: | Microtechnology |
| ISBN: | 3527312463 |
| Publisher: | Weinheim,2006,Wiley-VCH |
| Sub Title: | fundamentals, devices, fabrication, and applications |
| Publish place: | Weinheim |
| Publisher: | Wiley-VCH |
| Publish Date: | 2006 |
| Register Number | Version | Volume | Part | Reference | Call Number | lended | Date Back | Description | |
|---|---|---|---|---|---|---|---|---|---|
| 3096 | 1 | 0 |
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